How to test the electrical properties of thin film chips?


There are many different types of thin film chips according to the different materials, such as semiconductor thin films, thin films in flexible electronic devices, or other types of thin film materials. However, in general, thin film chips will involve integrated circuits or electronic components, so basic electrical performance parameters will be tested, such as resistance, capacitance, voltage and current characteristics, etc.

Thin film chip testing

The electrical performance test of thin film chips can be carried out according to the following steps:

1. Before testing, it is necessary to ensure that the surface of the film is clean. If necessary, use plasma cleaning or chemical treatment, and use customized tooling to fix the thin film chip to be tested.

2. Use a microprobe station with gold wire bonding or conductive glue to connect the electrodes. For nano-scale thin films, electron beam lithography may be required to make test electrodes, or non-contact testing may be used.

3. Resistance/resistivity test: The four-probe method is used to inject current through a constant current source and measure the voltage drop. It is suitable for conductive films and eliminates the influence of electrode contact resistance.

4. Leakage current and breakdown voltage test: Gradually increase the applied DC voltage, monitor the leakage current with a picoammeter, and determine it as a breakdown when the current suddenly increases. Record the breakdown voltage and evaluate the reliability of the insulating film.

RF chip test

5. Capacitance/inductance/dielectric constant test: Use LCR meter to measure the capacitance value of parallel plate structure film capacitor at specified frequency and calculate its dielectric loss.

6. S parameters: Use vector network analyzer to test the insertion loss, return loss, characteristic impedance, etc. of the chip, which is applicable to RF thin film devices.

The above test items and steps are applicable to RF thin film chips. Thin film chips of other material types will also have some other special test steps and items. For example, solar thin film cells need to test their photoelectric conversion efficiency. Some thin film chips also need high and low temperature tests and wet heat tests.

Thin film chip test

In general, the electrical performance test of thin film chips needs to be combined with parameter types, application scenarios and environmental conditions, and through precise instrument matching, calibration and automated processes, a comprehensive evaluation of resistance, capacitance, high frequency characteristics and reliability can be achieved.

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